Laser Interferometer Set
Heterodyne laser interferometer for metrology and direct real-time feedback control
The system includes heterodyne laser interferometer, measurement electronics and appropriate optics. The system is suitable for metrology, calibration and direct feedback control purposes and can be connected to PC via PCI or PCIx interfaces. Other interfaces: USB, Ethernet, Firewire are available on request. The control of the system can be realized either through NI VISA generic interface (MXI/2 interface peak transfer rates 33 MB/s, sustained transfer rate 23MB/s) or through direct 32bit GPIO real-time hardware interface direct (we can provide bridges to EtherCAT, CAN, FD-CAN – optional). Software control examples in Matlab – Simulink and Python – PyVISA examples available.
High quality
The sets offered were manufactured by Hewlett Packard, Agilent, Keysight and Renishaw which are premium quality products.
Customizable
Highly configurable optical setups for your application. Multiaxial setups. Various hardware and programming interfaces.
Fraction of the shelf price
Fully tested and verified refurbished interferometer sets with optional NIST calibration protocol.
Easy programming
Programming examples for Matlab Simulink – graphical modelling environment and Python – highly popular research programming environment.
Create closed-loop systems with ease
Applications
- Laser interferometer position measurement
- Precision angle measurement
- Laser based calibration systems
- Nanometer resolution direct real-time feedback control
- Stage servo control
- Vibration measurement
- Machine-tool calibration
- Semiconductor fabrication stages
- Mechanical parts validation
The setup
Laser Head 5517B
The Keysight 5517B is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. The standard head has 6 mm beam diameter. Other laser head types (5517A, 5517C, 5517D) including 3 mm variant are available on request.
Optics
The available optics differs from the case to case depending on the intended purpose of use. This picture illustrates single axis optics setup with 10766A linear interferometer, 10767A retroreflectors and optical fiber pickup with E1709 Remote High Performance Receiver. The Parker Linear Stage MX80 with optical holder illustrates possible use.
Control electronics
Elma VME rack – 5 slots (10 laser axes in total possible)
- National Instruments VME-MXI-2 VMEbus Extender (Windows 7,8,10 compatible)
- 10898A Dual Laser-Axis High-Resolution VMEbus Laser Axis Board (multiple boards possible)
One Axis setups offered with 10897C High-Resolution VMEbus Laser Axis Board
In the case more laser axes are needed larger VME racks are available.
