Optical setups
We are able to offer many different options of optical setups. From basic to complex setups customized to your needs
Linear optics
This is a basic setup for making precise linear measurements. The optics shown consists of Single Beam 10705A linear interferometeter along with 10704A optical retrofeflector and optical pickup. In this case input and ouput beams are superimposed on each other. System Resolution: λ/512 (1.2 nm, 0.047 µin) using 256x electronic interpolation.
Differential optics
10719A One Axis and 10721A Two Axis Differential Interferometers are suitable for differential linear of angular measurement. These interferometeres operate with 3mm beam in order to minimize Abbé offset errors. Two Axes version enables simultaneusly measure two differential measurements linear and angular (yaw) displacement. System Resolution: λ/1024 (0.62 nm), 0.007 arcsec (0.03 µrad) using electronic interpolation.
Angular optics
10770A Angular Interferometer together with 10771A Angular Reflector enable to mesure pitch and yaw motions along the linear motion of machine tools or linear motion axes. Ranges ±10° (36,000 arc sec) rotated about base of optics, ±20°(72,000 arc sec) rotated about center of optics are possible. The Maximum Beam Size used it 6mm.
Straightness optics
10774A Short Range and 10775A Long Range Straighness Optics with Wollaston prism enables measurements of straightness in distances 0.1 – 3 m (Short Range) and 1 – 30m (Long Range). Measurement Range ±1.5 mm orthogonal to measured axis, Optical Reference Inaccuracy ±0.015 M2 µm (M = distance of travel of the moving optic in meters), Short Range: Resolution Range: 0.01 µm (at 0.1 m) to 0.04 µm (at 3 m), Long Range: Resolution Range: 0.1 µm (at 1m) to 36 µm (at 30 m)
Squarness optics
10777A High Precision Optical Square outputs beam at precisely 90 degrees to an input beam. This square can be used as is or along with straigtness optics to measure the squareness of axes of machine tool, coordinate measuring machine or motion stage.
Custom number of optical axes
One axis
The following setup illustrates the basic arrangement of one axial linear interferometer setup using small compact Single Beam Interferometer 10705A along with optical retrofeflector 10704A. This is a basic setup for simple linear measurement.
Two axes
The following setup extends the one axial linear interferometer setup with two small compact Single Beam Interferometers 10705A along with optical retrofeflectors 10704A and one 10707A beam bender and 10701A 50% polarizing beam splitter. This is a basic setup for performing two independent linear measurements.
Multiple axes
Using appropriate beam splitters and beambenders the number of independent linear axis can be extended. For the case of motion stages multiaxial setups planar mirror interferometers such as 10706B or compact multiaxial setups (10737R and 10737L or similar) must be used.
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